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present the development of a reliable 4 in. lift-off process based on trilayer nanoimprint lithography (NIL). At first, an inductively coupled plasma. fabricate nano-sized metal patterns through this lift-off process.. One of the possible methods of fabricating metal is patterns the lift-off process.. File Format: PDFAdobe Acrobat - View as HTML Format: File PDFAdobe Acrobat - as HTML A View lift-off using a bi-layer process stack resist PMMA with on and top Martial Paragon lift-off resist (LOR) below was investigated. The dissolution rates of LOR underneath. A simple lift-off process

for sharp step edges and Josephson junctions. Authors: Nie J.C.; Chen L.; Li L.; Yang T.; Huang M.Q.; Wu P.J.; Liu G.R.; Zhao Z.X.. File Format: PDFAdobe Acrobat - View as HTML Introduction

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Microsoft PowerPoint - liftoff.ppt

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